Integrated Circuit Inspection with Reflected Confocal Microscopy

Explore real-time confocal imaging of integrated circuits with reflected light confocal microscopy. Instructions for operation of the tutorial are given beneath the applet window.

Error processing SSI file

This tutorial simulates imaging of integrated circuits using a reflected light Nipkow disk Confocal Microscope. Use the Choose an Integrated Circuit pull-down menu to select a chip to image. Then use the Focus Depth slider to drop focus through the various focal planes visible through the microscope. Clicking on the blue arrow buttons to the left and right of the slider will toggle through the images in single order.

Contributing Authors

Mortimer Abramowitz - Olympus America, Inc., Two Corporate Center Drive., Melville, New York, 11747.

Kirill I. Tchourioukanov and Michael W. Davidson - National High Magnetic Field Laboratory, 1800 East Paul Dirac Dr., The Florida State University, Tallahassee, Florida, 32310.